System | PC Base Control / Windows XP / Touch Screen |
---|---|
RF Generator & Matcher | 1㎾ / 13.56㎒ / Air Cooling, Safety Interlock |
Vacuum Pump (Built in system) |
Dry Pump [*Optional : Oil Pump] |
Gas Flow Controller | 1 mass flow controller for Ar or other gas |
System Dimension | (W)1200*(H)1850*(D)1350㎜ |
Chamber Dimension | (W)350*(H)390*(D)260㎜ |
Electrical Power | 220VAC, 3Phase, 25A, 50/60㎐ |
Capability | 2MGZ |
Weight | 620㎏ |
Lead Time | 10 분 per 1 cycle(420 secs treatment) |
Facility | CDA : 5㎏/㎠ N2 : 4㎏/㎠ Ar : 3㎏/㎠ |