We will always do our best for a better product.

VSP-88D Neo2

VSP-88D Neo2

Application

Specification

SystemDimension 1100(W)x 1250(D) x 1770(H)mm
InternalChamber Dimension 390(W)x 531.2(D) x 27.5(H)mm
SubstrateDimension 25~100(W)MM140~330(L)mm
PowerSource STD.RF generator, 1KW, 13.56MHz
VacuumPump STD.Dry Pump
GasFlow Controller 1Mass Flow Controller
PCBased Main Control IndustrialPC, C++, Touch Panel
ActualSPH 300strips/h (3 lanes), 400 strips/h (4 lanes)
Utility 220VAC, 3 Phase, 50/60Hz, Air 4~6 Kgf/cm3

Features

-Strip-based plasma system
-Automatic loading/unloading
-Same loading/unloading stage zone
-Small footprint
-Vacuum pump embedded design
-LAN networking and CIM
-Gripper moving type