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VSP-88D Pro+
Application
No delamination
Adhesion strength improved in W/B and D/B processes
Customer-tailored design
Specification
| Power source | RF Generator, 13.56MHz(2 sets) |
|---|---|
| Main control | Industrial Personal Computer with touch screen |
| Vacuum pump | Built-in type Dry Pump(Option : Oil pump) |
| Gas flow controller System dimension |
1 mass flow controller for Air(1 set STD) |
| W2450mm x H1960mm x D1470mm | |
| Chamber dimension | W284mm x H33mm x D434mm |
Features
-Excellent cleaning competence – water drop contact angle of 10 deg. or lower dependent upon materials
-High productivity with simultaneous working on four lanes and short cleaning time
-Design of simple utility connection, and vertical up down chamber
-Single inline system
-Vacuum plasma of small chamber
-PC-based operation and facilitated operation with touch screen
-LAN networking and CIM