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VSP-88D-W
Specification
TABLE
System |
PC Base Control / Windows 7 / LCD Touch Screen |
Power source |
RF Generator, 13.56MHz, 1KW |
Vacuum pump |
Oil rotary pump [Option : Dry pump] |
Gas flow controller |
1 mass flow controller [Option : Additional MFC (O2 or other gas)] |
System dimension |
W1800mm × H1805mm × D1500mm |
Electrical power |
220VAC, 3Phase, 60Hz, 30A |
Weight |
1400KG |
Loading capacity |
8 inch or 12 inch 1 Wafer with ring, 2 Cassette Loading |
Conversion |
8 inch and 12 inch |