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VSP-88D-W

VSP-88D-W

Application

Specification

TABLE
System PC Base Control / Windows 7 / LCD Touch Screen
Power source RF Generator, 13.56MHz, 1KW
Vacuum pump Oil rotary pump [Option : Dry pump]
Gas flow controller 1 mass flow controller [Option : Additional MFC (O2 or other gas)]
System dimension W1800mm × H1805mm × D1500mm
Electrical power 220VAC, 3Phase, 60Hz, 30A
Weight 1400KG
Loading capacity 8 inch or 12 inch 1 Wafer with ring, 2 Cassette Loading
Conversion 8 inch and 12 inch

Features