System | PC Base Control / Windows XP / Touch Screen |
---|---|
RF Generator & Matcher | 1㎾ / 13.56㎒ / Air Cooling, Safety Interlock |
Vacuum Pump | Oil Rotary Pump & Booster Pump |
Gas Flow Controller | 1 mass flow controller for Ar or other gas |
System Dimension | (W)1650*(H)1930*(D)1080㎜ |
Chamber Dimension | (W)863*(H)668*(D)868㎜ |
Electrical Power | 220VAC, 3Phase, 30A, 50/60㎐ |
Capability | 3MGZ Loading / 160*310㎜ Boat PKG 4MGZ Loading / 130*300㎜ Boat PKG 8MGZ Loading / 60*220 OR 72*240㎜ Strip PKG |
Weight | 800㎏ |
Lead Time | 10 min/cycle (420 secs treatment) |
Facility | CDA : 5㎏/㎠ N2 : 4㎏/㎠ Ar : 3㎏/㎠ |