VSP-88H
Application
Adhesion strength improved in D/B, W/B and M/D processes
Solution for delamination in mold process
Customer-tailored design
Specification
| Power source | RF Generator, 13.56MHz, 600W [Option : 1000Watts] |
|---|---|
| Vacuum pump | 1560L/min oil rotary pump with 300ß©/h booster [Option : Dry pump] |
| Gas flow controller | 1 mass flow controller [Option : Additional MFC (O2 or other gas)] |
| System dimension | W1110mm x H1850mm x D1010mm |
| Internal chamber dimension | size W580mm x H530mm x D580mm |
| Weight | 600KG |
| Electrical power | 200 VAC, 3Phase, 30A |
| Loading capacity | 8~16 Magazines depends on material / application |
| PC based main control | Windows XP & C++ Language & TFT LCD touch screen |
Features
- Cleaning capability improved by 20% over competitors by patented development of vertical shelf for slot magazine
- Large capacity: Loading up to 16 magazines (Standard: Loading 8 magazines)
- Oil rotary vacuum pump and booster pump embedded type (high vacuum)/Dry pump optional
- Applying semi-revolving door type for safety
- Improving wire adhesive strength and preventing mold delamination
- Designing nozzle for gas jetting for uniform cleaning
- Particular insulation mode for efficiently transferring RF power to stainless steel vacuum chamber and materials
- Operating at affordable costs by low system price and part localization
- Stainless steel vacuum chamber of long service life