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VSPI-88H

VSPI-88H

Application

Specification

System PC Base Control / Windows XP / Touch Screen
RF Generator & Matcher 1㎾ / 13.56㎒ / Air Cooling, Safety Interlock
Vacuum Pump
(Built in system)
Dry Pump
[*Optional : Oil Pump]
Gas Flow Controller 1 mass flow controller for Ar or other gas
System Dimension (W)1200*(H)1850*(D)1350㎜
Chamber Dimension (W)350*(H)390*(D)260㎜
Electrical Power 220VAC, 3Phase, 25A, 50/60㎐
Capability 2MGZ
Weight 620㎏
Lead Time 10 분 per 1 cycle(420 secs treatment)
Facility CDA : 5㎏/㎠
N2 : 4㎏/㎠
Ar : 3㎏/㎠

Features