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VSP-88C
Specification
TABLE
Power source |
RF Generator, 13.56MHz, 600W [Option : 1000W] |
Vacuum pump |
1200L/min oil rotary pump [Option : Dry pump] |
Gas flow controller |
1 mass flow controller [Option : Additional MFC (O2 or other gas)] |
System dimension |
W1065mm x H1815mm x D990mm |
Internal chamber dimension |
W300mm x H450mm x D577mm |
Weight |
550KG |
Electrical power |
220VAC, 3Phase, 25A |
Loading capacity |
8 Magazines depends on material / application |
System |
Industrial PC Base Control / Windows 7 / LCD Touch Screen |