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VSP-88D+

VSP-88D+

Application

Adhesion strength improved in D/B, W/B and M/D processes
Customer-tailored design Solution for delamination in mold process

Specification

System PCBase Control / Windows XP / Touch Screen
RFGenerator & Matcher 1kW/ 13.56MHz / Air Cooling, Safety Interlock
VacuumPump
(Built in system)
OilRotary Pump
[*Optional : Dry Pump]
GasFlow Controller 1Mass Flow Controller for Ar or other gas
SystemDimension (W)2950*(H)2012*(D)1390mm
ChamberDimension (W)284*(H)33*(D)434mm
ElectricalPower 220VAC,3Phase, 25A, 50/60Hz
Capability(UPH) 2Lane: 140 Boats/hr
ConversionWidth 25~80mm
Weight 1800kg
LeadTime 40seconds per 1 cycle(20 secs treatment)
Facility CDA :5kg/cm2
N2: 4kg/cm2
Ar:3kg/cm2

Features

-Applicable to FCBGA Matrix Boat
-Single inline system from magazine to magazine
-Excellent cleaning competence – Water drop contact angle of 10 deg. or lower dependent upon materials. System of relatively big size produced by Vision Semicon
-PC-based operation and facilitated operation with touch screen
-LAN networking and CIM
-High quality and stable uniformity
-Uniformity improved by nozzle design
-Affordable price and low operation costs