VISION SEMICON

System	PC Base Control / Windows XP / Touch Screen
RFGenerator & Matcher	1㎾ / 13.56㎒ / Air Cooling, Safety Interlock
VacuumPump (Built in System)	Dry Pump (620L/Min @50/60㎐) [*Optional : Oil Pump]
GasFlow Controller	2Mass Flow Controller for Ar or other gas
SystemDimension	(W)1800*(H)1570*(D)1270㎜
ChamberDimension	(W)284*(H)33*(D)434㎜
ElectricalPower	220VAC, 3Phase, 25A, 50/60㎐
Capability	Strip Width : W24.5~110㎜ (~80㎜ : 4Lane / 100㎜ : 3Lane) Strip Length : W170~300㎜
Transferring	MGZ to MGZ Conveyor Loading
Weight	1,200㎏
LeadTime(UPH)	270 strips/hr, with 3Lanes (based on plasma time 10sec)
Facility	CDA : 5㎏/㎠ N2 : 4㎏/㎠ Ar : 3㎏/㎠

- Long pusher type capable of handling long and heavy materials
- Gas cylinder switching system mounted for automatic switching of gas cylinder when one of gas cylinders is exhausted
- Easy operation during changing material (lead frame/substrate) size by mounting full automatic conversion function
- Electrode structure of special insulation allowing control of uniform surface contact angle: Less than 10 deg.
- PC-based program controlling (C++) and easy touch screen operation
- Enhancing convenience of operator and preventing erroneous operation with automatic magazine loading/unloading function
- Reliable cleaning capability with high quality and uniformity
- Design to expose to unique gas for rendering uniform cleaning effects
- Affordable price and low operation costs with localized system