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VSP-88R

VSP-88R

Application

Specification

TABLE
System PC Base Control / Windows XP / Touch Screen
RF Generator & Matcher 1㎾ / 13.56㎒ / Air Cooling, Safety Interlock
Vacuum Pump Oil Rotary Pump & Booster Pump
Gas Flow Controller 1 mass flow controller for Ar or other gas
System Dimension (W)1650*(H)1930*(D)1080㎜
Chamber Dimension (W)863*(H)668*(D)868㎜
Electrical Power 220VAC, 3Phase, 30A, 50/60㎐
Capability 3MGZ Loading / 160*310㎜ Boat PKG
4MGZ Loading / 130*300㎜ Boat PKG
8MGZ Loading / 60*220 OR 72*240㎜ Strip PKG
Weight 800㎏
Lead Time 10 min/cycle (420 secs treatment)
Facility CDA : 5㎏/㎠
N2 : 4㎏/㎠
Ar : 3㎏/㎠

Features