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VSP-88C
Application
Specification
| Power source | RF Generator, 13.56MHz, 600W [Option : 1000W] |
|---|---|
| Vacuum pump | 1200L/min oil rotary pump [Option : Dry pump] |
| Gas flow controller | 1 mass flow controller [Option : Additional MFC (O2 or other gas)] |
| System dimension | W1065mm x H1815mm x D990mm |
| Internal chamber dimension | W300mm x H450mm x D577mm |
| Weight | 550KG |
| Electrical power | 220VAC, 3Phase, 25A |
| Loading capacity | 8 Magazines depends on material / application |
| System | Industrial PC Base Control / Windows 7 / LCD Touch Screen |