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VSP-88D-M

VSP-88D-M

Application

Specification

System PCBase Control / Windows 7 / Touch Screen
PFGenerator & Matcher 1kW/ 13.56Mhz / Air Cooling, Safety Interlock
VacuumPump
(Built in System)
DryPump
GasFlow Controller 1Mass Flow Controller for Ar or other gas
SystemDimension (W)1800*(H)1700*(D)1100MM
ChamberDimension (W)332*(H)29.5*(D)455.2mm
ElectricalPower 220VAC,1Phase, 20A, 50/60Hz
Handler ManualLoading
Weight 600kg
Facility CDA:5kg/cm2
N2:4kg/cm2
Ar:3kg/cm2

Features