System | PCBase Control / Windows 7 / Touch Screen |
---|---|
RFGenerator & Matcher | 1kw/ 13.56Mhz / Air Cooling, Safety Interlock |
VacuumPump (Built in System) |
OilRotary Pump [*Optional: Dry Pump] |
Gas Flow Controller | 2Mass Flow Controller for Ar or other gas |
SystemDimension | (W)2180*(H)1940*(D)1670mm |
ChamberDimension | (W)296*(H)26.5*(D)490mm |
ElectricalPower | 220VAC,3Phase, 30A, 50/60Hz |
Capability | Strip Width:W40~80mm Strip Length: W180~260mm |
Transferring | MGZto MGZ Conveyor Loading |
Weight | 1,950kg |
LeadTime(UPH) | 640strips/hr, with 4Lanes (based on plasma time 8sec) |
Facility | CDA:5kg/cm2 N2:4kg/cm2 Ar:3kg/cm2 |