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VSP-88D Pro1+

VSP-88D Pro1+

Application

Specification

System PCBase Control / Windows 7 / Touch Screen
RFGenerator & Matcher 1kw/ 13.56Mhz / Air Cooling, Safety Interlock
VacuumPump
(Built in System)
OilRotary Pump
[*Optional: Dry Pump]
Gas Flow Controller 2Mass Flow Controller for Ar or other gas
SystemDimension (W)2180*(H)1940*(D)1670mm
ChamberDimension (W)296*(H)26.5*(D)490mm
ElectricalPower 220VAC,3Phase, 30A, 50/60Hz
Capability Strip Width:W40~80mm
Strip Length: W180~260mm
Transferring MGZto MGZ Conveyor Loading
Weight 1,950kg
LeadTime(UPH) 640strips/hr, with 4Lanes (based on plasma time 8sec)
Facility CDA:5kg/cm2
N2:4kg/cm2
Ar:3kg/cm2

Features