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VSP-88D Neo3

VSP-88D Neo3

Application

Specification

TABLE
System PC Base Control / Windows 7 / LCD Touch Screen
Power source RF Generator, 13.56MHz, 1KW [ICP Source]
Vacuum pump Dry pump
Gas flow controller 1 mass flow controller [Option : Additional MFC (O2 or other gas)]
System dimension W1450mm × H1950mm × D1850mm
Electrical power 220VAC, 3Phase, 60Hz, 30A
Weight 2800KG
Loading capacity <W77mm Substrate 4 Lane
<W95mm Substrate 3 Lane
<W160mm Substrate 2 Lane
Substrate Length : Max 310mm

Features