System | PCBase Control / Windows 7 / Touch Screen |
---|---|
RFGenerator & Matcher | 1kw/ 13.56Mhz / Air Cooling, Safety Interlock |
VacuumPump (Built in System) |
OilRotary Pump [*Optional: Dry Pump] |
GasFlow Controller | 2Mass Flow Controller for Ar or other gas |
SystemDimension | (W)2680*(H)1940*(D)1670mm |
ChamberDimension | (W)368*(H)34.5*(D)442.5mm |
ElectricalPower | 220VAC,3Phase, 30A, 50/60Hz |
Capability | Strip Width: W50~80mm(~80mm:4Lane/ 100mm: 3Lane) Strip Length:W215~300mm / Strip Thickness: 0.09~3mm |
Transferring | MGZ to MGZ ConveyorLoading |
Weight | 2,200kg |
LeadTime(UPH) | 600strips/hr, with 4Lanes(based on plasma time 8sec) |
Facility | CDA:5kg/cm2 N2:4kg/cm2 Ar:3kg/cm2 |