System | PC Base Control / Windows 7 / LCD Touch Screen |
---|---|
Power source | RF Generator, 13.56MHz, 1KW |
Vacuum pump | Oil rotary pump [Option : Dry pump] |
Gas flow controller | 1 mass flow controller [Option : Additional MFC (O2 or other gas)] |
System dimension | W1800mm × H1805mm × D1500mm |
Electrical power | 220VAC, 3Phase, 60Hz, 30A |
Weight | 1400KG |
Loading capacity | 8 inch or 12 inch 1 Wafer with ring, 2 Cassette Loading |
Conversion | 8 inch and 12 inch |