System | PC Base Control / Windows 7 / LCD Touch Screen |
---|---|
Power source | RF Generator, 13.56MHz, 1KW [ICP Source] |
Vacuum pump | Dry pump |
Gas flow controller | 1 mass flow controller [Option : Additional MFC (O2 or other gas)] |
System dimension | W1450mm × H1950mm × D1850mm |
Electrical power | 220VAC, 3Phase, 60Hz, 30A |
Weight | 2800KG |
Loading capacity | <W77mm Substrate 4 Lane <W95mm Substrate 3 Lane <W160mm Substrate 2 Lane Substrate Length : Max 310mm |