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VSP-88D Pro+L300

VSP-88D Pro+L300

Application

Specification

System PCBase Control / Windows 7 / Touch Screen
RFGenerator & Matcher 1kw/ 13.56Mhz / Air Cooling, Safety Interlock
VacuumPump
(Built in System)
OilRotary Pump
[*Optional: Dry Pump]
GasFlow Controller 2Mass Flow Controller for Ar or other gas
SystemDimension (W)2680*(H)1940*(D)1670mm
ChamberDimension (W)368*(H)34.5*(D)442.5mm
ElectricalPower 220VAC,3Phase, 30A, 50/60Hz
Capability Strip Width: W50~80mm(~80mm:4Lane/ 100mm: 3Lane)
Strip Length:W215~300mm / Strip Thickness: 0.09~3mm
Transferring MGZ to MGZ ConveyorLoading
Weight 2,200kg
LeadTime(UPH) 600strips/hr, with 4Lanes(based on plasma time 8sec)
Facility CDA:5kg/cm2
N2:4kg/cm2
Ar:3kg/cm2

Features