我们将竭尽全力做出更好的产品。

VSIP-88D

VSIP-88D

Application

Specification

System PC Base Control / Windows 7 / Touch Screen
RF Generator & Matcher 600W / 13.56㎒ / Air Cooling, Safety Interlock
VacuumPump
(Built in System)
STD. Dry Pump
Gas Flow Controller 1Mass Flow Controller for Ar or other gas
System Dimension (W)1100*(H)1550*(D)1080㎜
ChamberDimension (W)238*(H)37.4*(D)136㎜
ElectricalPower 220VAC, 1Phase, 25A, 50/60㎐
Frame alignment Unit & Feeding unit Unit Pick & Place method, 2Picker in/out Frame detector, overload detector
Conversion Width 65 ~ 75㎜
Weight 400㎏
Lead Time 30 seconds per 1 cycle(10 secs treatment)
Facility CDA : 5㎏/㎠
N2 : 4㎏/㎠
Ar : 3㎏/㎠

Features