System | PCBase Control / Windows 7 / Touch Screen |
---|---|
PFGenerator & Matcher | 1kW/ 13.56Mhz / Air Cooling, Safety Interlock |
VacuumPump (Built in System) |
DryPump |
GasFlow Controller | 1Mass Flow Controller for Ar or other gas |
SystemDimension | (W)1800*(H)1700*(D)1100MM |
ChamberDimension | (W)332*(H)29.5*(D)455.2mm |
ElectricalPower | 220VAC,1Phase, 20A, 50/60Hz |
Handler | ManualLoading |
Weight | 600kg |
Facility | CDA:5kg/cm2 N2:4kg/cm2 Ar:3kg/cm2 |