SystemDimension | 1100(W)x 1250(D) x 1770(H)mm |
---|---|
InternalChamber Dimension | 390(W)x 531.2(D) x 27.5(H)mm |
SubstrateDimension | 25~100(W)MM140~330(L)mm |
PowerSource | STD.RF generator, 1KW, 13.56MHz |
VacuumPump | STD.Dry Pump |
GasFlow Controller | 1Mass Flow Controller |
PCBased Main Control | IndustrialPC, C++, Touch Panel |
ActualSPH | 300strips/h (3 lanes), 400 strips/h (4 lanes) |
Utility | 220VAC, 3 Phase, 50/60Hz, Air 4~6 Kgf/cm3 |
Strip形式Plasma系统
自动加载卸载
相同的加载、卸载等候区
安装面积小
真空泵内置型设计
局域网及CIM
抓手装置(Gripper)移动型