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VSPO-2CM
Application
| 控温能力优秀，可提供最佳温度均匀度 电脑控制，使用方便 使用专用软件，操作简单，数据管理方便 密封及隔热效果显著的结构设计 采用防止温度过热装置，保护材料 |
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Specification
| Model | VSPO-2CM | |||
|---|---|---|---|---|
| Control | Temp. Control | UP-55A(30 Pattern, 99Segment) | ||
| Main. Control | IPC | |||
| Temperature | Range | Amb.+10℃ ~ 250℃ | ||
| Uniformity | ±3% | |||
| Ramp up time | Room Temp ~ 175℃ Within 30 min | |||
| Cooling down time | 175℃ - 80℃ Within 30 min | |||
| Sensor type | K-CA | |||
| AirFlow Type | duplex | |||
| Cooling type | Water Cooling | 2~5kg/cm2 | ||
| Purge | N2 Gas | 0 ~ 200 SCFH | ||
| Dry Air | 0 ~ 200 SCFH | |||
| Material | Internal | Stainless Steel | ||
| External | Stainless Steel 1.2t or Steel 1.2t power coating | |||
| Heater | 9kw / Chamber | |||
| Insulation | Mineral wool | |||
| Door gasket | Anti ESD Silicone Rubber | |||
| Safety device | Mechanical over temp. limit 1ea | |||
| Size (W x D x H) |
Internal(mm) | 850x650x500 | ||
| External(mm) | 1662x11400x2012 | |||
| Electric requirement | 220VAC, 3 Phase 50Hz/60Hz | |||
Features
温度均匀性 : Uniformity ±3%
控温准确度 : ±0.1℃
可单独使用，节省各真空腔装载方式的Cycle time
Digital Recording功能及联网功能
通过控制板调整温度以及多功能G8
通过条形码设置参数
局域网及CIM、PC硬件内保管数据
LCD显示屏自动显示IN/OUT时间