Power source | RF Generator, 13.56MHz, 1000Watts |
---|---|
Vacuum pump | Dry Pump 620L/min [Option : Oil Pump] |
Gas flow controller | 1 mass flow controller for standard [Option : Additional MFC (O2 or other gas)] |
System dimension | W1032 x H1717 x D1150mm (Except Tower Lamp) |
Internal chamber dimension | W342mm x H34mm x D362mm |
Transfer method | Pick & Place Jedec Tray Handing In-line system |
Loading capacity | 50Tray(In/Out elevating) |
Weight | 520kg |
Utility | 220VAC, 3Phase, Air 4~6kgf/㎠ |
PC based main control | Windows XP & C++ Language & TFT LCD touch screen |
시간에 따른 높은 생산력
심플한 유틸리티 연결 디자인 및 수직 업 다운 챔버
싱글 으로 인건비 절약
렌 네트워킹 및 CIM