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VSP-88D-T
Specification
Power source |
RF Generator, 13.56MHz, 1000Watts |
Vacuum pump |
Dry Pump 620L/min [Option : Oil Pump] |
Gas flow controller |
1 mass flow controller for standard [Option : Additional MFC (O2 or other gas)] |
System dimension |
W1032 x H1717 x D1150mm (Except Tower Lamp) |
Internal chamber dimension |
W342mm x H34mm x D362mm |
Transfer method |
Pick & Place Jedec Tray Handing In-line system |
Loading capacity |
50Tray(In/Out elevating) |
Weight |
520kg |
Utility |
220VAC, 3Phase, Air 4~6kgf/㎠ |
PC based main control |
Windows XP & C++ Language & TFT LCD touch screen |
Features
-High productivity over time
-Design of simple utility connection, and vertical up down chamber
-Single configuration for saving labor costs
-LAN networking and CIM