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VSP-88D Pro1-L300
Specification
System |
PC Base Control / Windows XP / Touch Screen |
RFGenerator & Matcher |
1㎾ / 13.56㎒ / Air Cooling, Safety Interlock |
VacuumPump
(Built in System) |
Dry Pump (620L/Min @50/60㎐)
[*Optional : Oil Pump] |
GasFlow Controller |
2Mass Flow Controller for Ar or other gas |
SystemDimension |
(W)1800*(H)1570*(D)1270㎜ |
ChamberDimension |
(W)284*(H)33*(D)434㎜ |
ElectricalPower |
220VAC, 3Phase, 25A, 50/60㎐ |
Capability |
Strip Width : W24.5~110㎜ (~80㎜ : 4Lane / 100㎜ : 3Lane)
Strip Length : W170~300㎜ |
Transferring |
MGZ to MGZ Conveyor Loading |
Weight |
1,200㎏ |
LeadTime(UPH) |
270 strips/hr, with 3Lanes (based on plasma time 10sec) |
Facility |
CDA : 5㎏/㎠
N2 : 4㎏/㎠
Ar : 3㎏/㎠ |
Features
- Long pusher type capable of handling long and heavy materials
- Gas cylinder switching system mounted for automatic switching of gas cylinder when one of gas cylinders is exhausted
- Easy operation during changing material (lead frame/substrate) size by mounting full automatic conversion function
- Electrode structure of special insulation allowing control of uniform surface contact angle: Less than 10 deg.
- PC-based program controlling (C++) and easy touch screen operation
- Enhancing convenience of operator and preventing erroneous operation with automatic magazine loading/unloading function
- Reliable cleaning capability with high quality and uniformity
- Design to expose to unique gas for rendering uniform cleaning effects
- Affordable price and low operation costs with localized system