Enhancing adhesion force between polyimide sensitive film and wafer
Hardening drying
Excellent temperature control capability
PC-based control program for convenient to use
Exclusive software for convenient system operation and data management
Good structure for sealing and heat insulation
Protecting specimens with overloading preventing system
Model | VSHO-1CM | ||
---|---|---|---|
Oxygen Monitoring | O2 Analyzer | Optional | |
Cooling Type | Water Cooling | 3 – 5 Kg/cm2, below 20℃ | |
Purge | N2 Gas | 0 – 500 SCFH | |
Exhaust | Cold Trap | Water Cooling | |
Material | Internal | Stainless Steel | |
External | Stainless Steel or Steel Powder Coating | ||
Heater | 24 KW / Chamber | ||
Insulation | Ceramic Wool | ||
Safety Device | Electrical Over Temp. Limit | ||
Mechanical Over Temp. Limit | |||
Electric Requirement | 220VAC or 380VAC, 3 Phase, 50/60Hz | ||
Network | SECS/GEM, LAN network |
-Temperature range: 10℃ - 450℃
-Precision of temperature control: ±0.5℃
-Implementing digital recording functions and networking
-Temperature adjustment and multiple step curing functions via control panel
-Saving data in LAN network and CIM, and PC hard disk
-Automatic display of input/output time on LCD monitor