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VSP-88D PP2
Specification
System |
PCBase Control / Windows XP / Touch Screen |
RFGenerator & Matcher |
1kw/ 13.56Mhz / Air Cooling, Safety Interlock |
VacuumPump
(Built in System) |
OilRotary Pump(2sets)
[*Optional: Dry Pump] |
Gas Flow Controller |
1Mass Flow Controller for Ar or other gas |
SystemDimension |
(W)2100*(H)1800*(D)1250mm |
ChamberDimension |
(W)306*(H)27.5*(D)281mm |
ElectricalPower |
220VAC,3Phase, 30A, 50/60Hz |
Capability |
3 Lane(Strip Width:62/74/77.5mm)
2 Lane(Strip Width: 95mm) |
ConversionWidth |
62/74/77.5/95mm |
Weight |
1,500kg |
LeadTime(UPH) |
60Strips/hr based on 300sec C/T |
Facility |
CDA:5kg/cm2
N2:4kg/cm2
Ar:3kg/cm2 |
Features
- Multi-chamber structure (one on the left and the right respectively) for high productivity
- Accommodating package of wide and thin materials, and material of significant warpage (max. 10 mm)
- Special designing for operating warped strip with carrier type handling
- Easy operation during changing material (MGZ) size by mounted manual conversion function
- Electrode structure of special insulation allowing control of uniform surface contact angle: Less than 10 deg.
- PC-based program controlling (C++) and easy touch screen operation
- Enhancing convenience of operator and preventing erroneous operation with automatic magazine loading/unloading function
- Reliable cleaning capability with high quality and uniformity
- Design to expose to unique gas for rendering uniform cleaning effects
- Affordable price and low operation costs with localized system