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VSP-88D-01

VSP-88D-01

Application

D/B, W/B, M/D 공정에서의 접착력 향상
고객 맞춤형 디자인 가능

Mold 공정 딜라미네이션 솔루션
 

Specification

System PC Base Control / Windows 7 / Touch Screen
PF Generator & Matcher 1kW/ 13.56Mhz / Air Cooling, Safety Interlock
VacuumPump
(Built in System)
Oil Rotary Pump
[*Optional : Dry Pump]
GasFlow Controller 1Mass Flow Controller for Ar or other gas
SystemDimension (W)1800*(H)1700*(D)1100MM
ChamberDimension (W)304*(H)26.5*(D)478㎜
ElectricalPower 220VAC, 3Phase, 25A, 50/60㎐
Capability Strip Width : W40~80㎜ (4Lane)
Strip Length : L180~250㎜ / Strip Thickness : 0.09~3㎜
Weight 1,300㎏
Lead Time 30 seconds per 1 cycle(10 secs treatment)
Facility CDA:5kg/cm2
N2:4kg/cm2
Ar:3kg/cm2

Features